Summary of MEMS Capacitive Accelerometer

Abstract

Micro-Electro-Mechanical System (MEMS) accelerometer (MEMS accelerometer), as an important MEMS device, has been widely used in the field of high-precision electronic technology and consumer electronic products. At present, the technology of MEMS accelerometer has been mature, and the sensor based on capacitance principle, piezoelectric effect, piezoresistive effect and other principles has been widely used in many aspects of national life and production and sustainable development. Combined with and according to all kinds of references, this paper briefly describes the shape composition and sensing principle of the MEMS capacitive accelerometer, enumerates the design and error optimization research of each research group for the sensor, and explains it with the relevant research data.