Research on Equipment of Magnetron Sputtering and Deposition of ZnO Films

Abstract

The parts of magnetron sputtering system were given in the paper. Meanwhile, we analyzed the working theory of magnetron sputtering. After pure zinc oxide (ZnO) film was grown, N-doped films was Prepared in NH3-O2-Ar atmosphere using zinc as a target, and Al-doped and N+Al codoped ZnO films were grown by co-sputtering technique using zinc and aluminum as targets. AFM showed the crystal quality of the Films. The results of experiment demonstrate that high-quality films have been achieved by this technique, and research on ZnO films can be done by the equipment.