Elastic deformation method for producing workpiece micro-protrusion topography in single-tip scratch test

Authors

  • Qicai Hu
  • Ning Huang
  • Ying Yan
  • Ping Zhou

DOI:

https://doi.org/10.56028/aetr.1.1.141

Keywords:

Single-crystal silicon, single-tip tool scratch test, micro-protrusion topography.

Abstract

The single-tip tool scratch test is one of the main methods to study the grinding mechanism of hard-and-brittle materials. Given the difficulty to realize nanometer high-speed scratching, this paper proposes a new single-tip tool scratch test system setup and proposes a vacuum adsorption method supported by a local elastic film to realize the micro-protrusion structure. The relationship between the film size and the micro-protrusion structure was analyzed by the finite element method. And the results showed that scratches with different depths could be obtained by controlling the width and thickness of the film. Experiments have verified that when the thickness of the film is 0.3-0.4 μm and the width of the film is about 1 mm, the scratch depth after scratching is about 100 nm, which meets the needs of scratching experiments. This study lays an important foundation for the high-speed single-tip tool scratch test.

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Published

2022-05-17